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Intrinsic top-down unmanufacturability

Kelly, MJ (2011) Intrinsic top-down unmanufacturability. NANOTECHNOLOGY, 22. -. ISSN 0957-4484

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Abstract

Although small structures can be fabricated by deposition, lithography and etching, in some cases their intrinsic variability precludes their use as elements in useful arrays. Manufacture is a proper subset of fabrication. We show that structures with 3 nm design rules can be fabricated but not manufactured in a top-down approach—they do not have the reproducibility to give a satisfactory yield to a pre-ordained specification. It is also shown that the transition from manufacturability to intrinsic unmanufacturability takes place at nearer 7 nm design rules.

Item Type: Article
Additional Information: This paper led to a very widespread debate on the internet, the invitation to lead an evening session at the 2011 IEEE NANO Meeting in Portland OR, a 30 minute interview on a science radio programme out of Texas, and the award of ‘Nanotech Hero of the Year 2011’ by the IEEE Spectrum team. No counter-example to the theorem has so far been produced, and the statement that large sections of nanoscience is intrinsically unmanufacturable stands. Funding agencies have been informed in the hope that the emphasis in research shifts decisively towards that which is proven manufacturable.
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron Job
Date Deposited: 05 Jan 2012 12:10
Last Modified: 03 Jun 2013 01:11
DOI: 10.1088/0957-4484/22/24/245303

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