CUED Publications database

Maskless photolithography via holographic optical projection

Bay, C, and Hübner, N and Freeman, J and Wilkinson, TD (2010) Maskless photolithography via holographic optical projection. Opt Lett, 35. pp. 2230-2232.

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Photonics
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:30
Last Modified: 22 Sep 2014 01:09
DOI: 10.1364/OL.35.002230