CUED Publications database

Vertical transistor with ultrathin silicon nitride gate dielectric

Moradi, M and Nathan, A and Haverinen, HM and Jabbour, GE (2009) Vertical transistor with ultrathin silicon nitride gate dielectric. Advanced Materials, 21. pp. 4505-4510.

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:20
Last Modified: 08 Dec 2014 02:11
DOI: