CUED Publications database

Vertical transistor with ultrathin silicon nitride gate dielectric

Moradi, M and Nathan, A and Haverinen, HM and Jabbour, GE (2009) Vertical transistor with ultrathin silicon nitride gate dielectric. Advanced Materials, 21. pp. 4505-4510.

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 09 Dec 2016 17:43
Last Modified: 11 Dec 2016 01:47
DOI: