CUED Publications database

Vertical transistor with ultrathin silicon nitride gate dielectric

Moradi, M and Nathan, A and Haverinen, HM and Jabbour, GE (2009) Vertical transistor with ultrathin silicon nitride gate dielectric. Advanced Materials, 21. pp. 4505-4510.

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:35
Last Modified: 02 Sep 2015 02:04
DOI: