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THE MODELING OF ION-IMPLANTATION IN A 3-LAYER STRUCTURE USING THE METHOD OF DOSE MATCHING

AMARATUNGA, GAJ and SABINE, K and EVANS, AGR (1985) THE MODELING OF ION-IMPLANTATION IN A 3-LAYER STRUCTURE USING THE METHOD OF DOSE MATCHING. IEEE T ELECTRON DEV, 32. pp. 1889-1890. ISSN 0018-9383

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Date Deposited: 16 Jul 2015 13:52
Last Modified: 04 Aug 2015 22:38
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