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MODELING OF ION IMPLANTATION IN A THREE-LAYER STRUCTURE USING THE METHOD OF DOSE MATCHING.

Amaratunga, GAJ and Sabine, K and Evans, AGR (1985) MODELING OF ION IMPLANTATION IN A THREE-LAYER STRUCTURE USING THE METHOD OF DOSE MATCHING. IEEE Transactions on Electron Devices, ED-32. pp. 1889-1890. ISSN 0018-9383

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:09
Last Modified: 10 Mar 2014 16:11
DOI: