CUED Publications database

The Modeling of Ion Implantation in a Three-Layer Structure Using the Method of Dose Matching

Amaratunga, GAJ and Sabine, K and Evans, AGR (1985) The Modeling of Ion Implantation in a Three-Layer Structure Using the Method of Dose Matching. IEEE Transactions on Electron Devices, 32. pp. 1889-1890. ISSN 0018-9383

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Abstract

The method of modeling ion implantation in a multilayer target using moments of a statistical distribution and numerical integration for dose calculation in each target layer is applied to the modelling of As<sup>+</sup> in poly-Si/SiO<inf>2</inf>/Si. Good agreement with experiment is obtained. Copyright © 1985 by The Institute of Electrical and Electronics Engineers, Inc.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 15 Dec 2015 13:27
Last Modified: 08 Feb 2016 08:24
DOI: 10.1109/T-ED.1985.22215