CUED Publications database

High temperature robust SOI ethanol sensor

Gardner, JW and Ahmed, T and Moseley, PT and Ali, SZ and Chowdhury, MF and Udrea, F (2011) High temperature robust SOI ethanol sensor. Procedia Engineering, 25. pp. 1317-1320. ISSN 1877-7058

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Abstract

In this paper we present a robust SOI-CMOS ethanol sensor based on a tungsten-doped lanthanum iron oxide sensing material. The device shows response to gas, has low power consumption, good uniformity, high temperature stability and can be manufactured at low cost and with integrated circuitry. The platform is a tungsten-based CMOS micro-hotplate that has been shown to be stable for over two thousand hours at a high temperature (600°C) in a form of accelerated life test. The tungsten-doped lanthanum iron oxide was deposited on the micro-hotplate as a slurry with terpineol using a syringe, dried and annealed. Preliminary gas testing was done and the material shows response to ethanol vapour. These results are promising and we believe that this combination of a robust CMOS micro-hotplate and a good sensing material can form the basis for a commercial CMOS gas sensor. © 2011 Published by Elsevier Ltd.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:29
Last Modified: 29 Nov 2014 19:03
DOI: 10.1016/j.proeng.2011.12.325