Guha, PK and Santra, S and Covington, JA and Udrea, F and Udrea, F and Gardner, JW and Gardner, JW (2011) Zinc oxide nanowire based hydrogen sensor on SOI CMOS platform. Procedia Engineering, 25. pp. 1473-1476. ISSN 1877-7058Full text not available from this repository.
Here we report on the successful low-temperature growth of zinc oxide nanowires (ZnONWs) on silicon-on-insulator (SOI) CMOS micro-hotplates and their response, at different operating temperatures, to hydrogen in air. The SOI micro-hotplates were fabricated in a commercial CMOS foundry followed by a deep reactive ion etch (DRIE) in a MEMS foundry to form ultra-low power membranes. The micro-hotplates comprise p+ silicon micro-heaters and interdigitated metal electrodes (measuring the change in resistance of the gas sensitive nanomaterial). The ZnONWs were grown as a post-CMOS process onto the hotplates using a CMOS friendly hydrothermal method. The ZnONWs showed a good response to 500 to 5000 ppm of hydrogen in air. We believe that the integration of ZnONWs with a MEMS platform results in a low power, low cost, hydrogen sensor that would be suitable for handheld battery-operated gas sensors. © 2011 Published by Elsevier Ltd.
|Uncontrolled Keywords:||Nano-material sensing layer SOI CMOS gas sensor|
|Depositing User:||Cron job|
|Date Deposited:||16 Jul 2015 14:09|
|Last Modified:||02 Sep 2015 04:34|