CUED Publications database

Film bulk acoustic resonator nanosensors for multi-task sensing

Luo, JK and Ashley, GM and Garcia-Gancedo, L and Kirby, PB and Flewitt, AJ and Milne, WI (2011) Film bulk acoustic resonator nanosensors for multi-task sensing. International Journal of Nanomanufacturing, 7. pp. 448-462. ISSN 1746-9392

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Abstract

This paper shows that film bulk acoustic resonator (FBAR) arrays can be very useful sensors either to detect physical parameters such as temperature and pressure directly or to detect bio-chemicals with extremely high sensitivities by incorporating a chemisorption layer or bio-probe molecules. Furthermore, it also shows that surface acoustic wave devices can be integrated with a FBAR sensor array on the same piezoelectric substrate as the microfluidics systems to perform transportation and mixing of biosamples etc. demonstrating the possibility to fabricate integrated lab-on-a-chip detection systems, in which all the actuators and sensors are operated by acoustic wave devices. This makes the detection system simple, low cost and easy to operate and hence has great commercial potential. © 2011 Inderscience Enterprises Ltd.

Item Type: Article
Uncontrolled Keywords: FBAR Film bulk acoustic resonator Lab-on-a-chip Multi-sensors SAW-microfluidics
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:11
Last Modified: 08 Dec 2014 02:38
DOI: 10.1504/IJNM.2011.043685