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Complementary metal-oxide-semiconductor-compatible and self-aligned catalyst formation for carbon nanotube synthesis and interconnect fabrication

Zhang, C and Yan, F and Bayer, BC and Blume, R and Van Der Veen, MH and Xie, R and Zhong, G and Chen, B and Knop-Gericke, A and Schlögl, R and Capraro, BD and Hofmann, S and Robertson, J (2012) Complementary metal-oxide-semiconductor-compatible and self-aligned catalyst formation for carbon nanotube synthesis and interconnect fabrication. Journal of Applied Physics, 111. ISSN 0021-8979

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:26
Last Modified: 17 Mar 2014 14:46
DOI:

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