Complementary metal-oxide-semiconductor-compatible and self-aligned catalyst formation for carbon nanotube synthesis and interconnect fabrication

Zhang, C and Yan, F and Bayer, BC and Blume, R and Van Der Veen, MH and Xie, R and Zhong, G and Chen, B and Knop-Gericke, A and Schlögl, R and Capraro, BD and Hofmann, S and Robertson, J (2012) Complementary metal-oxide-semiconductor-compatible and self-aligned catalyst formation for carbon nanotube synthesis and interconnect fabrication. Journal of Applied Physics, 111. ISSN 0021-8979

Actions (login required)