CUED Publications database

Influence of inert gases on ionized magnetron plasma deposition of carbon nitride thin films

Kusano, Y and Barber, ZH and Evetts, JE and Hutchings, IM (2003) Influence of inert gases on ionized magnetron plasma deposition of carbon nitride thin films. In: UNSPECIFIED pp. 601-605..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: carbon nitride films ionized magnetron inert gases CONICAL INDENTATION PLASTIC SOLIDS WORK
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:31
Last Modified: 01 May 2015 19:30
DOI: 10.1016/S0257-8972(03)00326-8