CUED Publications database

Influence of inert gases on ionized magnetron plasma deposition of carbon nitride thin films

Kusano, Y and Barber, ZH and Evetts, JE and Hutchings, IM (2003) Influence of inert gases on ionized magnetron plasma deposition of carbon nitride thin films. In: UNSPECIFIED pp. 601-605..

Full text not available from this repository.
Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: carbon nitride films ionized magnetron inert gases CONICAL INDENTATION PLASTIC SOLIDS WORK
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 18 May 2016 18:11
Last Modified: 24 Aug 2016 01:24
DOI: