Kusano, Y and Barber, ZH and Evetts, JE and Hutchings, IM (2003) Influence of inert gases on ionized magnetron plasma deposition of carbon nitride thin films. In: UNSPECIFIED pp. 601-605..
Full text not available from this repository.
| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
|---|
| Uncontrolled Keywords: | carbon nitride films ionized magnetron inert gases CONICAL INDENTATION PLASTIC SOLIDS WORK |
|---|
| Subjects: | UNSPECIFIED |
|---|
| Divisions: | Div E > Production Processes |
|---|
| Depositing User: | Cron Job |
|---|
| Date Deposited: | 28 Oct 2011 16:23 |
|---|
| Last Modified: | 20 May 2013 05:10 |
|---|
| DOI: | 10.1016/S0257-8972(03)00326-8 |
|---|
Actions (login required)
