CUED Publications database

Deposition of c-axis orientation aluminum nitride films on flexible polymer substrates by reactive direct-current magnetron sputtering

Jin, H and Zhou, J and Dong, SR and Feng, B and Luo, JK and Wang, DM and Milne, WI and Yang, CY (2012) Deposition of c-axis orientation aluminum nitride films on flexible polymer substrates by reactive direct-current magnetron sputtering. Thin Solid Films, 520. pp. 4863-4870. ISSN 0040-6090

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:05
Last Modified: 06 Oct 2014 01:24
DOI: