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Dual-mode thin film bulk acoustic wave resonators for parallel sensing of temperature and mass loading.

García-Gancedo, L and Pedrós, J and Zhao, XB and Ashley, GM and Flewitt, AJ and Milne, WI and Ford, CJ and Lu, JR and Luo, JK (2012) Dual-mode thin film bulk acoustic wave resonators for parallel sensing of temperature and mass loading. Biosens Bioelectron, 38. pp. 369-374.

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Abstract

Thin film bulk acoustic wave resonator (FBAR) devices supporting simultaneously multiple resonance modes have been designed for gravimetric sensing. The mechanism for dual-mode generation within a single device has been discussed, and theoretical calculations based on finite element analysis allowed the fabrication of FBARs whose resonance modes have opposite reactions to temperature changes; one of the modes exhibiting a positive frequency shift for a rise of temperature whilst the other mode exhibits a negative shift. Both modes exhibit negative frequency shift for a mass load and hence by monitoring simultaneously both modes it is possible to distinguish whether a change in the resonance frequency is due to a mass load or temperature variation (or a combination of both), avoiding false positive/negative responses in gravimetric sensing without the need of additional reference devices or complex electronics.

Item Type: Article
Uncontrolled Keywords: Acoustics Adsorption Animals Biosensing Techniques Equipment Design Gravitation Humans Proteins Sound Temperature Transducers X-Ray Diffraction Zinc Oxide
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:42
Last Modified: 06 Oct 2014 01:24
DOI: 10.1016/j.bios.2012.06.023

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