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One step self-aligned multilayer patterning process for the fabrication of organic complementary circuits in combination with inkjet printing

Li, S and Chen, W and Chu, D and Roy, S (2012) One step self-aligned multilayer patterning process for the fabrication of organic complementary circuits in combination with inkjet printing. Organic Electronics: physics, materials, applications, 13. pp. 737-743. ISSN 1566-1199

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Abstract

Recent development of solution processable organic semiconductors delineates the emergence of a new generation of air-stable, high performance p- and n-type materials. This makes it indeed possible for printed organic complementary circuits (CMOS) to be used in real applications. The main technical bottleneck for organic CMOS to be adopted as the next generation organic integrated circuit is how to deposit and pattern both p- and n-type semiconductor materials with high resolutions at the same time. It represents a significant technical challenge, especially if it can be done for multiple layers without mask alignment. In this paper, we propose a one-step self-aligned fabrication process which allows the deposition and high resolution patterning of functional layers for both p- and n-channel thin film transistors (TFTs) simultaneously. All the dimensional information of the device components is featured on a single imprinting stamp, and the TFT-channel geometry, electrodes with different work functions, p- and n-type semiconductors and effective gate dimensions can all be accurately defined by one-step imprinting and the subsequent pattern transfer process. As an example, we have demonstrated an organic complementary inverter fabricated by 3D imprinting in combination with inkjet printing and the measured electrical characteristics have validated the feasibility of the novel technique. © 2012 Elsevier B.V. All rights reserved.

Item Type: Article
Uncontrolled Keywords: Polymer circuits Self-alignment
Subjects: UNSPECIFIED
Divisions: Div B > Photonics
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:00
Last Modified: 08 Dec 2014 02:39
DOI: 10.1016/j.orgel.2012.01.019