CUED Publications database

Rapid Electron Beam Reacted Tantalum/Titanium Bilayers on Silicon

Raman, VK and Mahmood, F and McMahon, RA and Ahmed, H and Jeynes, C (1988) Rapid Electron Beam Reacted Tantalum/Titanium Bilayers on Silicon. Japanese Journal of Applied Physics, 27. pp. 2333-2339. ISSN 0021-4922

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The electrical and structural characteristics of tantalum-titanium bilayers on silicon reacted by electron beam heating have been investigated over a wide range of temperature and time conditions. The reacted layers exhibit low sheet resistance and stable electrical characteristics up to at least 1100°C. Titanium starts reacting from 750°C onwards for 100 milliseconds reaction times whereas tantalum starts reacting only above 900°C for such short reaction times. RBS results confirm that silicon is the major diffusing species and there is no evidence for the formation of ternary silicides. Reactions have also been explored on millisecond time scales by non-isothermal heating.

Item Type: Article
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 20:15
Last Modified: 03 Sep 2019 05:25