CUED Publications database

Observation of early to full covering stages of ethylene-based CVD of graphene

Celebi, K and Choi, JW and Cole, MT and Altun, AO and Teo, KBK and Park, HG (2012) Observation of early to full covering stages of ethylene-based CVD of graphene. Technical Proceedings of the 2012 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2012. pp. 180-183.

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Abstract

Scalable growth is essential for graphene-based applications. Recent development has enabled the achievement of the scalability by use of chemical vapor deposition (CVD) at 1000°C with copper as a catalyst and methane as a precursor gas. Here we report our observation of early stage of graphene growth based on an ethylene-based CVD method, capable of reducing the growth temperature to 770°C for monolayer graphene growth on copper. We track the early stages of slow growth under low ethylene flow rate and observe the graphene domain evolution by varying the temperature and growth time. Temperature-dependence of graphene domain density gives an apparent activation energy of 1.0 eV for nucleation.

Item Type: Article
Uncontrolled Keywords: CVD Ethylene Graphene Nucleation
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:19
Last Modified: 08 Dec 2014 02:38
DOI: