CUED Publications database

Micro-electro-mechanical resonant tilt sensor

Zou, X and Thiruvenkatanathan, P and Seshia, AA (2012) Micro-electro-mechanical resonant tilt sensor. 2012 IEEE International Frequency Control Symposium, IFCS 2012, Proceedings. pp. 744-747.

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This paper reports a micro-electro-mechanical tilt sensor based on resonant sensing principles. The tilt sensor measures orientation by sensing the component of gravitational acceleration along a specified input axis. Design aspects of the tilt sensor are first introduced and a design trade-off between sensitivity, resolution and robustness is addressed. A prototype sensor is microfabricated in a foundry process. The sensor is characterized to validate predictive analytical and FEA models of performance. The prototype is tested over tilt angles ranging over ±90 degrees and the linearity of the sensor is found to be better than 1.4% over the tilt angle range of ±20°. The noise-limited resolution of the sensor is found to be approximately 0.00026 degrees for an integration time of 0.6 seconds. © 2012 IEEE.

Item Type: Article
Divisions: Div C > Applied Mechanics
Div C > Materials Engineering
Depositing User: Cron job
Date Deposited: 16 Jul 2015 14:04
Last Modified: 08 Oct 2015 11:09
DOI: 10.1109/FCS.2012.6243702