Agrawal, DK and Woodhouse, J and Seshia, AA (2012) *Modelling non-linearities in a MEMS square wave oscillator.* 2012 IEEE International Frequency Control Symposium, IFCS 2012, Proceedings. pp. 260-265.

## Abstract

The modelling of the non-linear behaviour of MEMS oscillators is of interest to understand the effects of non-linearities on start-up, limit cycle behaviour and performance metrics such as output frequency and phase noise. This paper proposes an approach to integrate the non-linear modelling of the resonator, transducer and sustaining amplifier in a single numerical modelling environment so that their combined effects may be investigated simultaneously. The paper validates the proposed electrical model of the resonator through open-loop frequency response measurements on an electrically addressed flexural silicon MEMS resonator driven to large motional amplitudes. A square wave oscillator is constructed by embedding the same resonator as the primary frequency determining element. Measurements of output power and output frequency of the square wave oscillator as a function of resonator bias and driving voltage are consistent with model predictions ensuring that the model captures the essential non-linear behaviour of the resonator and the sustaining amplifier in a single mathematical equation. © 2012 IEEE.

Item Type: | Article |
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Subjects: | UNSPECIFIED |

Divisions: | Div C > Applied Mechanics |

Depositing User: | Cron Job |

Date Deposited: | 18 May 2016 18:23 |

Last Modified: | 24 Jul 2016 02:37 |

DOI: | 10.1109/FCS.2012.6243674 |