CUED Publications database

Mode-localized displacement sensing

Thiruvenkatanathan, P and Seshia, AA (2012) Mode-localized displacement sensing. Journal of Microelectromechanical Systems, 21. pp. 1016-1018. ISSN 1057-7157

Full text not available from this repository.

Abstract

We report the construction of a new class of micromachined displacement sensors that employ the phenomenon of vibration-mode localization for monitoring minute inertial displacements. It is demonstrated both theoretically and experimentally that the eigenstate-shifted output signal of such mode-localized displacement sensors may be as high as 1000 times greater than corresponding resonant-frequency variations that serve as the output in the more traditional vibratory resonant micromechanical displacement/motion sensors. The high parametric sensitivities attainable in such mode-localized displacement sensors, together with their inherent advantages of improved environmental robustness and electrical tunability, suggest an alternative approach in achieving improved sensitivity and stability in high-resolution displacement transduction. © 1992-2012 IEEE.

Item Type: Article
Uncontrolled Keywords: Microelectromechanical resonators mode localization mode-localized sensing
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:00
Last Modified: 08 Dec 2014 02:36
DOI: 10.1109/JMEMS.2012.2198047