CUED Publications database

Ion beam, focused ion beam, and plasma discharge machining

Allen, DM and Shore, P and Evans, RW and Fanara, C and O'Brien, W and Marson, S and O'Neill, W (2009) Ion beam, focused ion beam, and plasma discharge machining. CIRP Annals - Manufacturing Technology, 58. pp. 647-662. ISSN 0007-8506

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Abstract

Non-conventional methods of machining are used for many engineering applications where the traditional processes fail to be cost-effective. Such processes include Ion Beam Machining (IBM), focused ion beam (FIB) machining and plasma discharge machining. The mechanisms of material removal and associated hardware and software developed for industrial applications of these fascinating electro-physical and chemical machining processes are reviewed together with the latest research findings. © 2009 CIRP.

Item Type: Article
Uncontrolled Keywords: Focused Ion Beam Machining Ion Beam Machining Plasma discharge machining
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:22
Last Modified: 08 Dec 2014 02:35
DOI: 10.1016/j.cirp.2009.09.007