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Fabrication of Sub-10 nm Metallic Lines of Low Line-Width Roughness by Hydrogen Reduction of Patterned Metal-Organic Materials

Nedelcu, M and Saifullah, MSM and Hasko, DG and Jang, A and Anderson, D and Huck, WTS and Jones, GAC and Welland, ME and Kang, DJ and Steiner, U (2010) Fabrication of Sub-10 nm Metallic Lines of Low Line-Width Roughness by Hydrogen Reduction of Patterned Metal-Organic Materials. ADV FUNCT MATER, 20. pp. 2317-2323. ISSN 1616-301X

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Item Type: Article
Uncontrolled Keywords: BEAM-INDUCED DEPOSITION ELECTRON-BEAM NANOCRYSTALLINE NICKEL DIPPING-PYROLYSIS COMPOSITE OXIDES FILMS LITHOGRAPHY ZNO
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:23
Last Modified: 01 Aug 2015 01:09
DOI: 10.1002/adfm.201000219