Milne, WI and Fu, YQ and Garcia-Gancedo, L and Ashley, G and Luo, JK and Kirby, PB and Zhao, X and Lu, JR and Flewitt, AJ (2011) ZnO based SAW and FBAR devices for lab-on-a chip applications. Proceedings of the International Display Workshops, 2. pp. 1149-1152. ISSN 1883-2490Full text not available from this repository.
Acoustic wave devices were fabricated incorporating ZnO films deposited using both a standard rf magnetronand a novel High Target Utilisation (HiTUS) Sputtering System. Our results demonstrated the feasibility of using a single SAW-based actuation mechanism for both microfluidics and sensing. To further improve the sensitivity of our bio-sensors we have also investigated the use of Thin Film Bulk Acoustic Resonators.
|Divisions:||Div B > Solid State Electronics and Nanoscale Science|
|Depositing User:||Unnamed user with email email@example.com|
|Date Deposited:||02 Sep 2016 17:49|
|Last Modified:||25 Sep 2016 23:14|