CUED Publications database

ZnO based SAW and FBAR devices for lab-on-a chip applications

Milne, WI and Fu, YQ and Garcia-Gancedo, L and Ashley, G and Luo, JK and Kirby, PB and Zhao, X and Lu, JR and Flewitt, AJ (2011) ZnO based SAW and FBAR devices for lab-on-a chip applications. Proceedings of the International Display Workshops, 2. pp. 1149-1152. ISSN 1883-2490

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Abstract

Acoustic wave devices were fabricated incorporating ZnO films deposited using both a standard rf magnetronand a novel High Target Utilisation (HiTUS) Sputtering System. Our results demonstrated the feasibility of using a single SAW-based actuation mechanism for both microfluidics and sensing. To further improve the sensitivity of our bio-sensors we have also investigated the use of Thin Film Bulk Acoustic Resonators.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:11
Last Modified: 08 Dec 2014 02:32
DOI: