UNSPECIFIED (2008) Method of etching. doi:.Full text not available from this repository.
A method of creating micro patterned devices by patterning thin films which are deposited on a substrate. A channel or channels is created on the substrate, the width being of fine enough resolution such that a flowable mask material can be drawn along the channel by capillary forces.
|Uncontrolled Keywords:||channel micropattern pattern etch manufacture|
|Divisions:||Div B > Photonics|
|Depositing User:||Cron Job|
|Date Deposited:||15 Dec 2015 13:55|
|Last Modified:||13 Feb 2016 06:51|