CUED Publications database

Method of etching

UNSPECIFIED (2008) Method of etching. doi:.

Full text not available from this repository.

Abstract

A method of creating micro patterned devices by patterning thin films which are deposited on a substrate. A channel or channels is created on the substrate, the width being of fine enough resolution such that a flowable mask material can be drawn along the channel by capillary forces.

Item Type: Patent
Uncontrolled Keywords: channel micropattern pattern etch manufacture
Subjects: UNSPECIFIED
Divisions: Div B > Photonics
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:11
Last Modified: 10 Mar 2014 16:57
DOI: