CUED Publications database

Method of etching

UNSPECIFIED (2008) Method of etching. doi:.

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A method of creating micro patterned devices by patterning thin films which are deposited on a substrate. A channel or channels is created on the substrate, the width being of fine enough resolution such that a flowable mask material can be drawn along the channel by capillary forces.

Item Type: Patent
Uncontrolled Keywords: channel micropattern pattern etch manufacture
Divisions: Div B > Photonics
Depositing User: Cron job
Date Deposited: 16 Jul 2015 14:28
Last Modified: 04 Oct 2015 06:07