UNSPECIFIED (2008) Method of etching. doi:.Full text not available from this repository.
A method of creating micro patterned devices by patterning thin films which are deposited on a substrate. A channel or channels is created on the substrate, the width being of fine enough resolution such that a flowable mask material can be drawn along the channel by capillary forces.
|Uncontrolled Keywords:||channel micropattern pattern etch manufacture|
|Divisions:||Div B > Photonics|
|Depositing User:||Cron job|
|Date Deposited:||16 Jul 2015 14:28|
|Last Modified:||30 Nov 2015 17:55|