Udrea, F and Udrea, F and Ali, SZ and Brezeanu, M and Dumitru, V and Buiu, O and Poenaru, I and Chowdhury, MF and De Luca, A and Gardner, JW and Gardner, JW (2012) SOI sensing technologies for harsh environment. Proceedings of the International Semiconductor Conference, CAS, 1. pp. 3-10.Full text not available from this repository.
This paper reviews and addresses certain aspects of Silicon-On-Insulator (SOI) technologies for a harsh environment. The paper first describes the need for specialized sensors in applications such as (i) domestic and other small-scale boilers, (ii) CO2 Capture and Sequestration, (iii) oil & gas storage and transportation, and (iv) automotive. We describe in brief the advantages and special features of SOI technology for sensing applications requiring temperatures in excess of the typical bulk silicon junction temperatures of 150oC. Finally we present the concepts, structures and prototypes of simple and smart micro-hotplate and Infra Red (IR) based emitters for NDIR (Non Dispersive IR) gas sensors in harsh environments. © 2012 IEEE.
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