CUED Publications database

SOI sensing technologies for harsh environment

Udrea, F and Ali, SZ and Brezeanu, M and Dumitru, V and Buiu, O and Poenaru, I and Chowdhury, MF and De Luca, A and Gardner, JW (2012) SOI sensing technologies for harsh environment. Proceedings of the International Semiconductor Conference, CAS, 1. pp. 3-10.

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Abstract

This paper reviews and addresses certain aspects of Silicon-On-Insulator (SOI) technologies for a harsh environment. The paper first describes the need for specialized sensors in applications such as (i) domestic and other small-scale boilers, (ii) CO2 Capture and Sequestration, (iii) oil & gas storage and transportation, and (iv) automotive. We describe in brief the advantages and special features of SOI technology for sensing applications requiring temperatures in excess of the typical bulk silicon junction temperatures of 150oC. Finally we present the concepts, structures and prototypes of simple and smart micro-hotplate and Infra Red (IR) based emitters for NDIR (Non Dispersive IR) gas sensors in harsh environments. © 2012 IEEE.

Item Type: Article
Uncontrolled Keywords: CMOS technology for sensing applications Silicon on Insulator (SOI) System in Package (SiP)
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:49
Last Modified: 12 Dec 2014 19:04
DOI: 10.1109/SMICND.2012.6400708