CUED Publications database

Characterization and fabrication of zinc oxide nanowire devices

Lin, W-C and Lin, Y-C and Shih, C-J and Chu, Y-L and Esashi, M and Seshia, AA (2013) Characterization and fabrication of zinc oxide nanowire devices. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). pp. 441-444. ISSN 1084-6999

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Abstract

In this paper, we demonstrate an approach for the local synthesis of ZnO nanowires (ZnO NWs) and the potential for such structures to be incorporated into device applications. Three network ZnO NW devices are fabricated on a chip by using a bottom-up synthesis approach. Microheaters (defined by standard semiconductor processing) are used to synthesize the ZnO NWs under a zinc nitrate (Zn(NO3)2·6H2O) and hexamethylenetetramine (HMTA, (CH2)6·N4) solution. By controlling synthesis parameters, varying densities of networked ZnO NWs are locally synthesized on the chip. The fabricated networked ZnO NW devices are then characterized using UV excitation and cyclic voltammetry (CV) experiments to measure their photoresponse and electrochemical properties. The experimental results show that the techniques and material systems presented here have the potential to address interesting device applications using fabrication methods that are fully compatible with standard semiconductor processing. © 2013 IEEE.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:46
Last Modified: 16 Dec 2014 19:05
DOI: 10.1109/MEMSYS.2013.6474273