Lin, WC and Lin, YC and Shih, CJ and Chu, YL and Esashi, M and Seshia, AA (2013) Characterization and fabrication of zinc oxide nanowire devices. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). pp. 441-444. ISSN 1084-6999Full text not available from this repository.
In this paper, we demonstrate an approach for the local synthesis of ZnO nanowires (ZnO NWs) and the potential for such structures to be incorporated into device applications. Three network ZnO NW devices are fabricated on a chip by using a bottom-up synthesis approach. Microheaters (defined by standard semiconductor processing) are used to synthesize the ZnO NWs under a zinc nitrate (Zn(NO3)2·6H2O) and hexamethylenetetramine (HMTA, (CH2)6·N4) solution. By controlling synthesis parameters, varying densities of networked ZnO NWs are locally synthesized on the chip. The fabricated networked ZnO NW devices are then characterized using UV excitation and cyclic voltammetry (CV) experiments to measure their photoresponse and electrochemical properties. The experimental results show that the techniques and material systems presented here have the potential to address interesting device applications using fabrication methods that are fully compatible with standard semiconductor processing. © 2013 IEEE.
|Divisions:||Div C > Applied Mechanics|
|Depositing User:||Cron Job|
|Date Deposited:||09 Dec 2016 17:30|
|Last Modified:||23 Mar 2017 07:20|