CUED Publications database

Programmable transformation of vertically aligned carbon nanotubes into 3D microstructures

De Volder, M and Tawfick, S and Park, SJ and Copic, D and Hart, AJ (2011) Programmable transformation of vertically aligned carbon nanotubes into 3D microstructures. In: UNSPECIFIED pp. 2718-2721..

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Abstract

Capillary forming of carbon nanotubes (CNTs) enables the fabrication of unique 3D microstructures over large areas. In this paper we focus on the simulation as well as on the integration of these structures in MEMS devices. We developed finite element models (FEM) that enables qualitative prediction of shape transformations caused by capillary forming; and show how capillary formed CNT structured can be integrated with conventional lithographic processing for patterning of polymers and metals in concert with CNTs. © 2011 IEEE.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: Capillary Carbon nanotube (CNT) Self-Assembly Three-dimensional
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 12:05
Last Modified: 08 Dec 2014 02:22
DOI: 10.1109/TRANSDUCERS.2011.5969791