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Microsized piston-cylinder pneumatic and hydraulic actuators fabricated by lithography

De Volder, M and Ceyssens, F and Reynaerts, D and Puers, R (2009) Microsized piston-cylinder pneumatic and hydraulic actuators fabricated by lithography. Journal of Microelectromechanical Systems, 18. pp. 1100-1104. ISSN 1057-7157

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:42
Last Modified: 19 May 2014 01:12
DOI:

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