De Volder, M and Ceyssens, F and Reynaerts, D and Puers, R (2009) Microsized piston-cylinder pneumatic and hydraulic actuators fabricated by lithography. Journal of Microelectromechanical Systems, 18. pp. 1100-1104. ISSN 1057-7157Full text not available from this repository.
Future microrobotic applications require actuators that can generate a high actuation force in a limited volume. Up to now, little research has been performed on the development of pneumatic or hydraulic microactuators, although they offer great prospects in achieving high force densities. In addition, large actuation strokes and high actuation speeds can be achieved by these actuators. This paper describes a fabrication process for piston-cylinder pneumatic and hydraulic actuators based on etching techniques, UV-definable polymers, and low-temperature bonding. Prototype actuators with a piston area of 0.15 mm2 have been fabricated in order to validate the production process. These actuators achieve actuation forces of more than 0.1 N and strokes of 750 μm using pressurized air or water as driving fluid. © 2009 IEEE.
|Uncontrolled Keywords:||Hydraulic microactuator Microfluidics Micromechanics Pneumatic microactuator|
|Divisions:||Div E > Production Processes|
|Depositing User:||Cron Job|
|Date Deposited:||07 Mar 2014 11:42|
|Last Modified:||08 Dec 2014 02:23|