CUED Publications database

A hybrid surface tension seal for pneumatic and hydraulic microactuators

De Volder, MFL and Reynaerts, D (2009) A hybrid surface tension seal for pneumatic and hydraulic microactuators. Microsystem Technologies, 15. pp. 739-744. ISSN 0946-7076

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Abstract

Recent research revealed that microactuators driven by pressurized fluids are able to generate high power and force densities at microscale. One of the main technological barriers in the development of these actuators is the fabrication low friction seals. This paper presents a novel scalable seal technology, which resists the actuation pressure relying on a combination of a clearance seal and a surface tension seal. This approach allows to seal pressures of more than 800 kPa without leakage. The seal is tested on an actuator with a bore of 0.8 mm2 and a length of 13 mm, which was able to generate forces up to 0.32 N. © 2008 Springer-Verlag.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:28
Last Modified: 08 Dec 2014 02:23
DOI: 10.1007/s00542-008-0756-3