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A fluidic micro-actuator with an integrated inductive position sensor - art. no. 64150F

De Volder, M and Coosemans, J and Ceyssens, F and Peirs, J and Puers, R and Reynaerts, D (2007) A fluidic micro-actuator with an integrated inductive position sensor - art. no. 64150F. In: UNSPECIFIED F4150-F4150..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: fluidic micro-actuator micro inductive position sensor mechatronic microsystem integrated actuatorsensors system microrobotics
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:59
Last Modified: 19 May 2014 01:12
DOI: 10.1117/12.695525

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