CUED Publications database

Comparison of two seal technologies for hydraulic microactuators

De Volder, M and Peirs, J and Reynaerts, D and Coosemans, J and Puers, R and Smal, O and Raucent, B (2005) Comparison of two seal technologies for hydraulic microactuators. In: UNSPECIFIED pp. 333-336..

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Abstract

In order to improve the power density of microactuators, recent research focuses on the applicability of fluidic power at microscale. One of the reasons that hydraulic actuators are still uncommon in micro system technology is due to the difficulty of fabricating powerful microseals. This paper presents two seal technologies that are suitable for sealing small-scale hydraulic actuators. Measurements on prototype actuators show that force densities up to 0,45 N/mm2 (0,025 N/mm3) and work densities up to 0,2 mJ/mm3 can easily be achieved with the developed seal technology. These characteristics can still be improved as the maximum driving pressures of the actuators have not yet been determined. © 2005 IEEE.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: High power density microsystem Hydraulic microactuator Microseal
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:59
Last Modified: 08 Dec 2014 02:24
DOI: 10.1109/SENSOR.2005.1496424