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SI AND N DANGLING BOND CREATION IN SILICON-NITRIDE THIN-FILMS

WARREN, W and ROBERTSON, J and KANICKI, J (1993) SI AND N DANGLING BOND CREATION IN SILICON-NITRIDE THIN-FILMS. APPLIED PHYSICS LETTERS, 63. pp. 2685-2687. ISSN 0003-6951

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 18 May 2016 17:57
Last Modified: 23 Jul 2016 23:58
DOI: 10.1063/1.110420