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SI AND N DANGLING BOND CREATION IN SILICON-NITRIDE THIN-FILMS

WARREN, W and ROBERTSON, J and KANICKI, J (1993) SI AND N DANGLING BOND CREATION IN SILICON-NITRIDE THIN-FILMS. APPLIED PHYSICS LETTERS, 63. pp. 2685-2687. ISSN 0003-6951

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:39
Last Modified: 27 Mar 2015 19:05
DOI: 10.1063/1.110420