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SI AND N DANGLING BOND CREATION IN SILICON-NITRIDE THIN-FILMS

WARREN, W and ROBERTSON, J and KANICKI, J (1993) SI AND N DANGLING BOND CREATION IN SILICON-NITRIDE THIN-FILMS. APPLIED PHYSICS LETTERS, 63. pp. 2685-2687. ISSN 0003-6951

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:28
Last Modified: 21 Dec 2014 19:03
DOI: 10.1063/1.110420