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SI AND N DANGLING BOND CREATION IN SILICON-NITRIDE THIN-FILMS

WARREN, WL and ROBERTSON, J and KANICKI, J (1993) SI AND N DANGLING BOND CREATION IN SILICON-NITRIDE THIN-FILMS. APPLIED PHYSICS LETTERS, 63. pp. 2685-2687. ISSN 0003-6951

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 09 Dec 2016 17:43
Last Modified: 20 Feb 2017 05:14
DOI: