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SI AND N DANGLING BOND CREATION IN SILICON-NITRIDE THIN-FILMS

WARREN, W and ROBERTSON, J and KANICKI, J (1993) SI AND N DANGLING BOND CREATION IN SILICON-NITRIDE THIN-FILMS. APPLIED PHYSICS LETTERS, 63. pp. 2685-2687. ISSN 0003-6951

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 15 Dec 2015 13:03
Last Modified: 14 Feb 2016 02:36
DOI: 10.1063/1.110420