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ELECTRON-PARAMAGNETIC-RESONANCE INVESTIGATION OF CHARGE TRAPPING CENTERS IN AMORPHOUS-SILICON NITRIDE FILMS

WARREN, W and KANICKI, J and ROBERTSON, J and POINDEXTER, E and MCWHORTER, P (1993) ELECTRON-PARAMAGNETIC-RESONANCE INVESTIGATION OF CHARGE TRAPPING CENTERS IN AMORPHOUS-SILICON NITRIDE FILMS. JOURNAL OF APPLIED PHYSICS, 74. pp. 4034-4046. ISSN 0021-8979

Full text not available from this repository.
Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:27
Last Modified: 17 Mar 2014 15:03
DOI: 10.1063/1.355315

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