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ELECTRON-PARAMAGNETIC-RESONANCE INVESTIGATION OF CHARGE TRAPPING CENTERS IN AMORPHOUS-SILICON NITRIDE FILMS

WARREN, W and KANICKI, J and ROBERTSON, J and POINDEXTER, E and MCWHORTER, P (1993) ELECTRON-PARAMAGNETIC-RESONANCE INVESTIGATION OF CHARGE TRAPPING CENTERS IN AMORPHOUS-SILICON NITRIDE FILMS. JOURNAL OF APPLIED PHYSICS, 74. pp. 4034-4046. ISSN 0021-8979

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:20
Last Modified: 02 Aug 2015 01:25
DOI: 10.1063/1.355315