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ELECTRON-PARAMAGNETIC-RESONANCE INVESTIGATION OF CHARGE TRAPPING CENTERS IN AMORPHOUS-SILICON NITRIDE FILMS

WARREN, W and KANICKI, J and ROBERTSON, J and POINDEXTER, E and MCWHORTER, P (1993) ELECTRON-PARAMAGNETIC-RESONANCE INVESTIGATION OF CHARGE TRAPPING CENTERS IN AMORPHOUS-SILICON NITRIDE FILMS. JOURNAL OF APPLIED PHYSICS, 74. pp. 4034-4046. ISSN 0021-8979

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 18 May 2016 17:57
Last Modified: 28 Jun 2016 23:10
DOI: 10.1063/1.355315