Li, FM and Bayer, BC and Hofmann, S and Speakman, SP and Ducati, C and Milne, WI and Flewitt, AJ (2013) High-density remote plasma sputtering of high-dielectric-constant amorphous hafnium oxide films. Physica Status Solidi (B) Basic Research, 250. pp. 957-967. ISSN 0370-1972
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|Item Type: ||Article|
|Depositing User: ||Cron Job|
|Date Deposited: ||29 May 2013 11:10|
|Last Modified: ||28 Oct 2013 01:13|
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