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Experimental comparison of FBARs and SMRs responsitivities to mass loadings

Garcia-Gancedo, L and Pedros, J and Iborra, E and Clement, M and Olivares, J and Capilla, J and Luo, JK and Milne, WI and Flewitt, AJ (2012) Experimental comparison of FBARs and SMRs responsitivities to mass loadings. IEEE International Ultrasonics Symposium, IUS. pp. 1545-1548. ISSN 1948-5719

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Abstract

The utilisation of thin film technology to develop film bulk acoustic resonators (FBARs) and solidly mounted resonators (SMRs), offers great potential to outperform the sensitivity and minimum detection limit of gravimetric sensors. Up to now, the choice between FBARs and SMRs depends primarily on the users' ability to design and fabricate Bragg reflectors and/or membranes, because neither of these two types of resonators has been demonstrated to be superior to the other. In the work reported here, it is shown that identically designed FBARs and SMRs resonating at the same frequency exhibit different responsitivities, Rm, to mass loadings, being the FBARs more responsive than the SMRs. For the specific device design and resonant frequency (∼2 GHz) of the resonators presented, FBARs' mass responsitivity is ∼20% greater than that of SMRs, and although this value should not be taken as universal for all possible device designs, it clearly indicates that FBAR devices should be favoured over SMRs in gravimetric sensing applications. © 2012 IEEE.

Item Type: Article
Uncontrolled Keywords: BAW FBAR micro-weighting responsitivity SMR Zinc Oxide (ZnO)
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:45
Last Modified: 08 Dec 2014 02:17
DOI: 10.1109/ULTSYM.2012.0386