CUED Publications database

Sensors based on SAW and FBAR technologies

García-Gancedo, L and Milne, WI and Luo, JK and Flewitt, AJ (2013) Sensors based on SAW and FBAR technologies. Proceedings of SPIE - The International Society for Optical Engineering, 8793. ISSN 0277-786X

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Abstract

Over the last few years a number of sensing platforms are being investigated for their use in drug development, microanalysis or medical diagnosis. Lab-on-a-chip (LOC) are devices integrating more than one laboratory functions on a single device chip of a very small size, and typically consist of two main components: microfluidic handling systems and sensors. The physical mechanisms that are generally used for microfluidics and sensors are different, hence making the integration of these components difficult and costly. In this work we present a lab-on-a-chip system based on surface acoustic waves (for fluid manipulation) and film bulk acoustic resonators (for sensing). Coupling surface acoustic waves into liquids induces acoustic streaming and motion of micro-droplets, whilst it is well-known that bulk acoustic waves can be used to fabricate microgravimetric sensors. Both technologies offer exceptional sensitivity and can be fabricated from piezoelectric thin films deposited on Si substrates, reducing the fabrication time/cost of the LOC devices. © 2013 SPIE.

Item Type: Article
Uncontrolled Keywords: FBAR LOC microfluidics SAW sensor ZnO
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:45
Last Modified: 08 Dec 2014 02:17
DOI: 10.1117/12.2022205