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Measurement of Residual Stresses in Ferroelectric Pb(Zr

Zhu, H and Chu, D (2013) Measurement of Residual Stresses in Ferroelectric Pb(Zr. Jpn J Appl Phys, 52. 128004-128004-3. ISSN 0021-4922

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Abstract

The residual stresses in Pb(Zr<inf>0.3</inf>Ti<inf>0.7</inf>)O<inf>3</inf>thin films were measured by the \sin^{2}\Psi method using the normal X-ray incidence. The spacing of different planes (hkl) parallel to the film surface were converted to the spacing of a set of inclined planes (100). The angles between (100) and (hkl) were equivalent to the tilting angles of (100) from the normal of film surface. The residual stresses were extracted from the linear slope of the strain difference between the equivalent inclined direction and normal direction with respect to the \sin^{2}\Psi. The results were in consistency with that derived from the conventional \sin^{2}\Psi method.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Photonics
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:58
Last Modified: 18 Feb 2021 15:42
DOI: