CUED Publications database

Investigating vibration dyanmics of cross-coupled MEMS resonators for reduced motional resistance

Erbes, A and Thiruvenkatanathan, P and Yan, J and Seshia, AA (2013) Investigating vibration dyanmics of cross-coupled MEMS resonators for reduced motional resistance. 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. pp. 1711-1714.

Full text not available from this repository.

Abstract

This paper investigates the vibration dynamics of a closed-chain, cross-coupled architecture of MEMS resonators. The system presented here is electrostatically transduced and operates at 1.04 MHz. Curve veering of the eigenvalue loci is used to experimentally quantify the coupling spring constants. Numerical simulations of the motional resistance variation against induced perturbation are used to assess the robustness of the cross-coupled system as opposed to equivalent traditional open-ended linear one-dimensional coupling scheme. Results show improvements of as much as 32% in the motional resistance between the cross-coupled system and its one-dimensional counterpart. © 2013 IEEE.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Div D > Geotechnical and Environmental
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:12
Last Modified: 19 Sep 2017 01:29
DOI: