CUED Publications database

On-chip switching of a silicon nitride micro-ring resonator based on digital microfluidics platform

Zuta, Y and Goykhman, I and Desiatov, B and Levy, U (2010) On-chip switching of a silicon nitride micro-ring resonator based on digital microfluidics platform. Optics Express, 18. pp. 24762-24769.

Full text not available from this repository.

Abstract

We demonstrate the switching of a silicon nitride micro ring resonator (MRR) by using digital microfluidics (DMF). Our platform allows driving micro-droplets on-chip, providing control over the effective refractive index at the vicinity of the resonator and thus facilitating the manipulation of the transmission spectrum of the MRR. The device is fabricated using a process that is compatible with high-throughput silicon fabrication techniques with buried highly doped silicon electrodes. This platform can be extended towards controlling arrays of micro optical devices using minute amounts of liquid droplets. Such an integration of DMF and optical resonators on chip can be used in variety of applications, ranging from biosensing and kinetics to tunable filtering on chip. © 2010 Optical Society of America.

Item Type: Article
Uncontrolled Keywords: Electrodes Equipment Design Microfluidic Analytical Techniques Silicon Compounds
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:13
Last Modified: 08 Apr 2021 07:01
DOI: 10.1364/OE.18.024762