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Experimental demonstration of locally oxidized hybrid silicon-plasmonic waveguide

Goykhman, I and Desiatov, B and Levy, U (2010) Experimental demonstration of locally oxidized hybrid silicon-plasmonic waveguide. Applied Physics Letters, 97. ISSN 0003-6951

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We experimentally demonstrate a self-aligned approach for the fabrication of nanoscale hybrid silicon-plasmonic waveguide fabricated by local oxidation of silicon (LOCOS). Implementation of the LOCOS technique provides compatibility with standard complementary metal-oxide-semiconductor technology and allows avoiding lateral misalignment between the silicon waveguide and the upper metallic layer. We directly measured the propagation and the coupling loss of the fabricated hybrid waveguide using a near-field scanning optical microscope. The demonstrated structure provides nanoscale confinement of light together with a reasonable propagation length of ∼100 μm. As such, it is expected to become an important building block in future on-chip optoelectronic circuitry. © 2010 American Institute of Physics.

Item Type: Article
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:13
Last Modified: 19 Nov 2020 10:19
DOI: 10.1063/1.3496463