CUED Publications database

Comparison Between Single Shot Micromachining of Silicon With Nanosecond Pulse Shaped IR Fiber Laser and DPSS UV Laser

Li, K and Sparkes, M and O'Neill, W (2014) Comparison Between Single Shot Micromachining of Silicon With Nanosecond Pulse Shaped IR Fiber Laser and DPSS UV Laser. IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 20. ISSN 1077-260X

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Item Type: Article
Uncontrolled Keywords: DPSS UV laser IR fiber laser micromachining shaped pulse silicon optical/thermal dynamic properties
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Div B > Photonics
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 18:57
Last Modified: 27 Jul 2017 05:39
DOI: