CUED Publications database

Realization of submicron-scale square-like silicon waveguide via optimized LOCOS process

Desiatov, B and Goykhman, I and Levy, U (2010) Realization of submicron-scale square-like silicon waveguide via optimized LOCOS process. Optics InfoBase Conference Papers.

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Abstract

We demonstrate the design, fabrication and experimental characterization of submicron-scale silicon waveguide fabricated by local oxidation of silicon and provide guidelines for controlling its profile. Near field measurements shows submicron confinement of the optical mode. © 2010 Optical Society of America.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:12
Last Modified: 12 Nov 2020 12:05
DOI: