CUED Publications database

Increased carbon nanotube area density after catalyst generation from cobalt disilicide using a cyclic reactive ion etching approach

Xie, R and Zhang, C and Chen, B and Van Der Veen, M and Zhong, G and Robertson, J (2014) Increased carbon nanotube area density after catalyst generation from cobalt disilicide using a cyclic reactive ion etching approach. Journal of Applied Physics, 115. ISSN 0021-8979

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Abstract

We used a cyclic reactive ion etching (RIE) process to increase the Co catalyst density on a cobalt disilicide (CoSi 2 ) substrate for carbon nanotube (CNT) growth. Each cycle of catalyst formation consists of a room temperature RIE step and an annealing step at 450 °C. The RIE step transfers the top-surface of CoSi 2 into cobalt fluoride; while the annealing reduces the fluoride into metallic Co nanoparticles. We have optimized this cyclic RIE process and determined that the catalyst density can be doubled in three cycles, resulting in a final CNT shell density of 6.6 × 10 11 walls·cm -2 . This work demonstrates a very effective approach to increase the CNT density grown directly on silicides. © 2014 AIP Publishing LLC.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronic Devices & Materials
Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:05
Last Modified: 05 Oct 2017 02:14
DOI: