CUED Publications database

A seismic-grade resonant MEMS accelerometer

Zou, X and Thiruvenkatanathan, P and Seshia, AA (2014) A seismic-grade resonant MEMS accelerometer. Journal of Microelectromechanical Systems, 23. pp. 768-770. ISSN 1057-7157

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Abstract

We report on the characterization of a high-resolution micromachined resonant accelerometer fabricated in an SoI-microelectromechanical (MEMS) foundry process. A prototype device demonstrated scale factor of 142.8 Hz/m/s 2 , dynamic range of > 140 dB, and noise-limited resolution that is comparable with existing high-resolution macroscale seismometers. Experimental characterisation detailing the benchmarking of the MEMS prototype relative to an existing macroscale seismometer shows that the MEMS device tracks the passive ambient seismic response measured by a macroscale seismometer (Guralp systems CMG-3TD) over a measurement bandwidth extending from near dc (0.02 Hz) up to 100 Hz. © 1992-2012 IEEE.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:16
Last Modified: 16 Nov 2017 02:22
DOI: