CUED Publications database

Observations of modal interaction in lateral bulk acoustic resonators

Charmet, J and Daly, R and Thiruvenkatanathan, P and Woodhouse, J and Seshia, AA (2014) Observations of modal interaction in lateral bulk acoustic resonators. Applied Physics Letters, 105. ISSN 0003-6951

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Abstract

© 2014 AIP Publishing LLC. High Q factor resonators, such as micro-electro-mechanical systems based lateral bulk acoustic resonators excited in their primary in-plane modes, are promising candidates for timing and frequency reference applications as well as gravimetric bio-sensing. The excitation and detection of out-of-plane modes is often assumed to be unlikely in such devices. However, we report observations of modal interaction with out-of-plane spurious modes that reduces the Q factor of the in-plane modes by up to a factor 3. We also show that the appearance of the spurious modes is unpredictable, and therefore, we propose statistical metrics to minimize the risk of modal interaction.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Div E > Production Processes
Div C > Materials Engineering
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:47
Last Modified: 07 Sep 2017 01:47
DOI: