CUED Publications database

A high-resolution micro-electro-mechanical resonant tilt sensor

Zou, X and Thiruvenkatanathan, P and Seshia, AA (2014) A high-resolution micro-electro-mechanical resonant tilt sensor. Sensors and Actuators, A: Physical, 220. pp. 168-177. ISSN 0924-4247

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Abstract

© 2014 Elsevier B.V. All rights reserved. This paper reports on the design and experimental evaluation of a high-resolution micro-electro-mechanical (MEM) tilt sensor based on resonant sensing principles. The sensors incorporate a pair of double-ended tuning fork (DETF) resonant strain gauges, the mechanical resonant frequencies of which shift in proportion to an axial force induced by variations in the component of gravitational acceleration along a specified input axis. An analysis of the structural design of such sensors (using analytical and finite element modelling) is presented, followed by experimental test results from device prototypes fabricated using a silicon-on-insulator (SOI) MEMS technology. This paper reports measurement conducted to quantify sensor scale factor, temperature sensitivity, scale factor linearity and resolution. It is demonstrated that such sensors provide a ±90° dynamic range for tilt measurements with a temperature sensitivity of nearly 500 ppb/K (equating to systematic sensitivity error of approximately 0.007°/K). When configured as a tilt sensor, it is also shown that the scale factor linearity is better than 1.4% for a ±20° tilt angle range. The bias stability of a micro-fabricated prototype is below 500 ng for an averaging time of 0.8 s making these devices a potentially attractive option for numerous precision tilt sensing applications.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:45
Last Modified: 07 Sep 2017 01:47
DOI: