CUED Publications database

White noise responsiveness of an AlN piezoelectric MEMS cantilever vibration energy harvester

Jia, Y and Seshia, AA (2014) White noise responsiveness of an AlN piezoelectric MEMS cantilever vibration energy harvester. In: UNSPECIFIED.

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Abstract

© Published under licence by IOP Publishing Ltd. This paper reports the design, analysis and experimental characterisation of a piezoelectric MEMS cantilever vibration energy harvester, the enhancement of its power output by adding various values of end mass, as well as assessing the responsiveness towards white noise. Devices are fabricated using a 0.5 μm AlN on 10 μm doped Si process. Cantilevers with 5 mm length and 2 mm width were tested at either unloaded condition (MC0: f n 577 Hz) or subjected to estimated end masses of 2 mg (MC2: f n 129 Hz) and 5 mg (MC5: f n 80 Hz). While MC0 was able to tolerate a higher drive acceleration prior to saturation (7 g with 0.7 μW), MC5 exhibited higher peak power attainable at a lower input vibration (2.56 μW at 3 ms -2 ). MC5 was also subjected to band-limited (10 Hz to 2 kHz) white noise vibration, where the power response was only a fraction of its resonant counterpart for the same input: peak instantaneous power > 1 μW was only attainable beyond 2 g of white noise, whereas single frequency resonant response only required 2.5 ms -2 . Both the first resonant response and the band-limited white noise response were also compared to a numerical model, showing close agreements.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:09
Last Modified: 12 Oct 2017 01:48
DOI: