CUED Publications database

Experimental, analytical and numerical investigation of non-linearity of SOI diode temperature sensors at extreme temperatures

De Luca, A and Pathirana, V and Ali, SZ and Dragomirescu, D and Udrea, F (2015) Experimental, analytical and numerical investigation of non-linearity of SOI diode temperature sensors at extreme temperatures. Sensors and Actuators, A: Physical, 222. pp. 31-38. ISSN 0924-4247

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Abstract

©2014 Elsevier B.V. All rights reserved. This paper presents the performance of a silicon-on-insulator (SOI) p+/p-well/n+ diode temperature sensor, which can operate in an extremely wide temperature range of 80 K to 1050 K. The thermodiode is placed underneath a tungsten micro-heater which is embedded in a thin dielectric membrane, obtained with a post-CMOS deep reactive ion etching process. Analytical and numerical models are used to support experimental findings. Non-linearity, sensitivity and methods for their reduction and enhancement, respectively, are investigated in detail.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:43
Last Modified: 07 Sep 2017 01:44
DOI: