CUED Publications database

Precision glass microstructure fabrication using ultrafast laser induced chemical etching

Feng, W and Shevchenko, R and Sparkes, MR and O'Neill, W (2014) Precision glass microstructure fabrication using ultrafast laser induced chemical etching. In: UNSPECIFIED pp. 39-42..

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Abstract

Femtosecond laser irradiation followed by chemical etching (FLICE) is a novel micro-fabrication technique that allows versatile production of 3D hollow structures, however the use of the most common etchant, hydrofluoric acid (HF), is problematic since it is extremely hazardous. We have utilized an alternative technique that employs a less hazardous etchant, potassium hydroxide (KOH), and have examined the laser processing parameters for etched high-aspect microfluidic tunnels, microand macro - surface structures in-bulk of fused silica substrates. The impact of etching temperature is investigated suggesting an applicability of an effective and HF-free FLICE process fulfilling the need for etch rate or etch selectivity.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div E > Production Processes
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:21
Last Modified: 03 Aug 2017 03:15
DOI: