CUED Publications database

Fabrication of Free-Standing Single-Crystal Silicon Nanostructures for the Study of Thermal Transport and Defect Scattering in Low Dimensional Systems

Potts, A and Williams, DA and Young, RJ and Blaikie, RJ and McMahon, RA and Hasko, DG and Cleaver, JRA and Ahmed, H (1990) Fabrication of Free-Standing Single-Crystal Silicon Nanostructures for the Study of Thermal Transport and Defect Scattering in Low Dimensional Systems. Japanese Journal of Applied Physics, 29. pp. 2675-2679. ISSN 0021-4922

Full text not available from this repository.

Abstract

Free-standing wire samples have been fabricated that enable low dimensional conducting wires to be examined by transmission electron microscopy (TEM). These structures have been fabricated using a combination of gas-assisted ion beam etching and electron beam lithography, and have cross-sectional dimensions between 70 nm and 1 μm, and lengths of up to 50 μm. The free-standing wires have been examined by TEM before and after ion implantation and annealing. The results indicate that no extended defects are created in the wires, even for high doses (10<SUP>16</SUP>cm<SUP>−3</SUP>) or high beam energies (>50 keV). The reason for this is not fully understood. In addition, the fabrication process has been extended so that low temperature electrical measurements can be performed on the TEM samples. In this way it is hoped eventually to study the role of specific crystalline defects in limiting the electronic and phonon transport.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 20:15
Last Modified: 19 Oct 2017 01:33
DOI: