CUED Publications database

Graphene-based MMIC process development and RF passives design

Askar, A and Hamed, A and Saeed, M and Sagade, AA and Neumaier, D and Negra, R (2015) Graphene-based MMIC process development and RF passives design. In: UNSPECIFIED pp. 299-302..

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Abstract

© 2015 IMA: IMATech e.V. This paper describes an available graphene process with respect to material properties and also the work in progress to complete the graphene process back-end implementation to be MMIC-compatible. This process extension is critical to enable fully integrated circuits and systems based on graphene transistors. A stable process back-end is proposed, characterized and tested on both silicon and quartz substrates. Based on this, a process cross-section is now available for EM simulations. A prototype chip of RF passive devices including spiral inductors, MIM capacitors and thin film resistors, TFRs, is fabricated and measured on both substrates. On-wafer measurements of the fabricated passive devices up to 30 GHz show good agreement with EM simulation results.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:34
Last Modified: 03 Aug 2017 03:08
DOI: