CUED Publications database

A Hybrid Vibration Powered Microelectromechanical Strain Gauge

Jia, Y and Do, CD and Zou, X and Seshia, AA (2016) A Hybrid Vibration Powered Microelectromechanical Strain Gauge. IEEE Sensors Journal, 16. pp. 235-241. ISSN 1530-437X

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Abstract

© 2016 IEEE. This paper reports the demonstration of an ultra-low-power micro-electromechanical system (MEMS)-CMOS oscillator for strain sensing, powered by a miniature piezoelectric vibration energy harvester (VEH). The employment of the Pierce oscillator topology in a MEMS-CMOS oscillator allows for the minimization of the power requirement to as low as 1.1 μW under ideal conditions. A VEH prototype, developed with hard lead zirconate titanate on a stainless steel substrate (∼ 0.4-cm 3 practical operational volume), is able to deliver a typical average power of 187 μW at 11.4 ms -2 and 514 Hz. Some of the practical challenges associated with the integration of the harvester and the MEMS sensor have also been explored, which helps to lay the foundation for realizing net-zero-power strain sensors.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:09
Last Modified: 07 Sep 2017 01:44
DOI: